Michael A. HUFF

Manufacturing of test structures using e-beam lithography for use in characterization and quality control of metrology tools used in semiconductor manufacturing

Low-cost, high-performance and highly customizable micro-scale pressure and force sensor

Low-cost microfluidic devices and systems and method of manufacturing

Method and system for controlling the state of stress in deposited thin films

Microsensors applied to athletes bodies in order to provide real-time feedback about sport-specific technique for sport performance improvements

Integrated microfluidic system and method of fabrication

Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride

Piezoelectrically-actuated microvalve device and method of fabrication

Packaging of microfluidic devices and microfluidic integrated systems and method of fabrication

Low-cost method of making a hard mask for high resolution and low dimensional variations for the fabrication and manufacturing of micro- and nano-devices and -systems

Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride

Three-way microvalve device and method of fabrication

Three-way microvalve device and method of fabrication

Self-aligned dynamic pattern generator device and method of fabrication

Method for fabricating and manufacturing micro—and nano-fabricated devices and systems securely

Method and system for integrated MEMS and NEMS using deposited thin films having pre-determined stress states

Method for etching deep, high-aspect ratio features into glass, fused silica, and quartz materials

Self-aligned dynamic pattern generator device and method of fabrication

Versatile communication system and method of implementation using heterogeneous integration

Variable capacitor tuned using laser micromachining

Means for improved implementation of laser diodes and laser diode arrays

Method of fabricating MEMS, NEMS, photonic, micro- and nano-fabricated devices and systems

Method of reflecting impinging electromagnetic radiation and limiting heating caused by absorbed electromagnetic radiation using engineered surfaces on macro-scale objects

Tailorable titanium-tungsten alloy material thermally matched to semiconductor substrates and devices

Low-temperature wafer bonding of semiconductors to metals

Method of fabricating small dimensioned lens elements and lens arrays using surface tension effects

Means for improved implementation of laser diodes and laser diode arrays

Variable capacitor tuned using laser micromachining

Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure

Phased array antenna using (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Method of fabricating radio frequency microelectromechanical systems (MEMS) devices on low-temperature co-fired ceramic (LTCC) substrates

Fabrication of movable micromechanical components employing low-cost, high-resolution replication technology method

MEMS-based variable capacitor

Micro-mechanical capacitive inductive sensor for detection of relative or absolute pressure

Micro-mechanical capacitive inductive sensor for wireless detection of relative or absolute pressure