Schlierbach
Germany
26
2026-05-21
The entities that hold a legal rights for patent applications filed by inventor KAELBERER Arnd:
Arnd KAELBERER from Schlierbach, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for singulating a wafer and suitable device
#2 | 2026-01-15METHOD FOR PRODUCING MICROELECTROMECHANICAL STRUCTURES
#3 | 2025-06-19MICROELECTROMECHANICAL DEVICE
#4 | 2024-03-14Microelectromechanical Apparatus with Heating Element
#5 | 2019-01-17Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
#6 | 2017-07-20Etching device and etching method
#7 | 2017-03-02Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror
#8 | 2016-11-10Micromechanical pressure sensor device and corresponding manufacturing method
#9 | 2016-10-20Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure
#10 | 2016-03-24INTEGRATED ROTATION RATE AND ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN INTEGRATED ROTATION RATE AND ACCELERATION SENSOR
#11 | 2015-07-16Micromechanical pressure sensor device and corresponding manufacturing method
#12 | 2015-05-14Micromechanical sensor device
#13 | 2015-05-07Micromechanical sensor device
#14 | 2015-01-08Micromechanical component and manufacturing method for a micromechanical component
#15 | 2013-05-02Micromechanical component and method for manufacturing a micromechanical component
#16 | 2011-08-18Acceleration sensor having an electrode bridge
#17 | 2011-06-16Method for determining the sensitivity of an acceleration sensor or magnetic field sensor
#18 | 2011-01-20Device made of single-crystal silicon
#19 | 2010-05-06Acceleration sensor and method for its manufacture
#20 | 2010-02-25Triaxial acceleration sensor
#21 | 2009-06-18Micromechanical system including a suspension and an electrode positioned movably
#22 | 2009-01-08Device made of single-crystal silicon
#23 | 2008-12-25Micromechanical component and manufacturing method
#24 | 2007-02-22Micromechanical component
#25 | 2005-08-11Micromechanical switch
#26 | 2005-06-02Method for reducing the adhesive properties of MEMS and anti-adhesion-coated device
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