Lars TEBJE

Micromechanical component for a pressure and inertial sensor device

Micromechanical structure and micromechanical sensor

Micromechanical sensor device and corresponding production method

Micromechanical system, method for operating a micromechanical system

Micromechanical inertial sensor

Method for operating a micromechanical inertial sensor

INTERPOSER FOR MOUNTING A VERTICALLY INTEGRATED HYBRID COMPONENT ON A COMPONENT CARRIER

Method for manufacturing a MEMS element

Micromechanical acceleration sensor

Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component

Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure

Micromechanical sensor

Micromechanical structure, in particular sensor arrangement, and corresponding operating method

Hybrid intergrated component and method for the manufacture thereof

Micromechanical component and method for manufacturing a micromechanical component

Inertial sensor with overlapping torsional springs

SENSOR AND METHOD FOR MANUFACTURING A SENSOR

Acceleration sensor having an electrode bridge

Micromechanical component and method for operating a micromechanical component

MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT

Acceleration sensor and method for its manufacture

Triaxial acceleration sensor

Triaxial acceleration sensor

Micromechanical z-sensor

Micromechanical acceleration sensor having an open seismic mass

Micromechanical system including a suspension and an electrode positioned movably

Acceleration sensor