Thomas Thaler

City:

Jena

Country:

Germany

Published Applications:

Last publication date:

2025-12-04

Top Assignees for applications by Thomas Thaler

The entities that hold a legal rights for patent applications filed by inventor Thaler Thomas:

Carl Zeiss SMT GmbH 7 Oberkochen, Germany
Carl Zeiss SMS Ltd 1 Misgav, Israel

Recent patent applications by Thaler Thomas

Thomas Thaler from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2025-12-04

US20250369899A1

Physics

MASK METROLOGY MEASURING DEVICE AND METHOD FOR EXAMINING A PHOTOMASK

#2 | 2024-05-09

US20240152057A1

Physics

APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

#3 | 2021-12-23

US20210397099A1

Physics

Apparatus and method for characterizing a microlithographic mask

#4 | 2021-08-19

US20210255541A1

Physics

Method for measuring photomasks

#5 | 2019-04-11

US20190107783A1

Physics

Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography

#6 | 2019-04-11

US20190107776A1

Physics

Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried out

#7 | 2019-01-10

US20190011839A1

Physics

Method and device for characterizing a mask for microlithography

#8 | 2018-04-05

US20180095358A1

Physics

Method and device for determining an OPC model

#9 | 2015-07-16

US20150198798A1

Physics

Emulation of reproduction of masks corrected by local density variations

InventorID:

2158041 ⎘