Tokyo
Japan
66
2024-11-07
The entities that hold a legal rights for patent applications filed by inventor Ina Hideki:
Hideki Ina from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
OPTICAL ELEMENT AND OPTICAL DESIGN METHOD
#2 | 2021-09-30COLOR FILTER ARRAY, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING COLOR FILTER ARRAY
#3 | 2021-09-30Method of manufacturing semiconductor device
#4 | 2021-07-01Inspection apparatus and manufacturing method for semiconductor device
#5 | 2020-06-04Optical apparatus and equipment
#6 | 2020-04-30Photoelectric converting device and apparatus
#7 | 2018-01-11Photoelectric conversion device and manufacturing method of the same having waveguide inclined side face with improved sensitivity by increasing reflection rate of light reaching side face near incident face or entrance face of waveguide
#8 | 2016-05-19Lithography apparatus, and method of manufacturing article
#9 | 2016-05-05LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND ARTICLE MANUFACTURING METHOD
#10 | 2015-12-17LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
#11 | 2015-12-17LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
#12 | 2015-11-19DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD
#13 | 2015-11-12LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING AN ARTICLE
#14 | 2015-07-02OPTICAL DEVICE, LITHOGRAPHY APPARATUS AND MANUFACTURING METHOD OF ARTICLE
#15 | 2015-06-04METHOD FOR MEASURING INCLINATION OF BEAM, DRAWING METHOD, DRAWING APPARATUS, AND METHOD OF MANUFACTURING OBJECT
#16 | 2015-05-28DRAWING DATA CREATING METHOD, DRAWING APPARATUS, DRAWING METHOD, AND ARTICLE MANUFACTURING METHOD
#17 | 2015-01-22Interferometer, lithography apparatus, and method of manufacturing article
#18 | 2014-10-30IRRADIATION APPARATUS FOR IRRADIATING CHARGED PARTICLE BEAM, METHOD FOR IRRADIATION OF CHARGED PARTICLE BEAM, AND METHOD FOR MANUFACTURING ARTICLE
#19 | 2014-10-30Lithography apparatus, lithography method, and method of manufacturing article
#20 | 2014-10-30STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
#21 | 2014-10-30LITHOGRAPHY APPARATUS, AND METHOD FOR MANUFACTURING ARTICLE
#22 | 2014-10-30LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, AND METHOD FOR MANUFACTURING DEVICE
#23 | 2014-08-21Imprint apparatus and method of manufacturing article
#24 | 2014-06-19DRAWING APPARATUS, AND ARTICLE MANUFACTURING METHOD
#25 | 2014-06-05Measuring apparatus, imprint system, measuring method, and device manufacturing method
#26 | 2014-05-01MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING CHIP
#27 | 2014-04-17GENERATION METHOD, DESIGN METHOD, MANUFACTURING METHOD OF OPTICAL SYSTEM, AND STORAGE MEDIUM
#28 | 2013-10-10DETECTION APPARATUS, LITHOGRAPHY APPARATUS, CHARGED PARTICLE BEAM APPARATUS, AND ARTICLE MANUFACTURING METHOD
#29 | 2013-09-05DRAWING APPARATUS, REFERENCE MEMBER, AND METHOD OF MANUFACTURING ARTICLE
#30 | 2013-08-22DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
#31 | 2013-07-25LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
#32 | 2013-07-04DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
#33 | 2013-06-13Method of manufacturing device, and substrate
#34 | 2013-06-13LITHOGRAPHY APPARATUS AND METHOD, AND METHOD OF MANUFACTURING ARTICLE
#35 | 2013-05-02OPTICAL APPARATUS, POSITION DETECTION APPARATUS, MICROSCOPE APPARATUS, AND EXPOSURE APPARATUS
#36 | 2011-11-17Process for producing a chip using a mold
#37 | 2011-09-29Imprint apparatus and method of manufacturing article
#38 | 2011-08-18Process for producing a device using a mold
#39 | 2011-06-23Imprint apparatus, imprint method, and article manufacturing method
#40 | 2010-09-16IMPRINT APPARATUS AND METHOD
#41 | 2010-04-01IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
#42 | 2010-03-25IMPRINTING METHOD
#43 | 2010-03-25Imprint apparatus and method of manufacturing article
#44 | 2010-03-25Imprinting apparatus and method therefor
#45 | 2010-03-25Imprint apparatus and article manufacturing method
#46 | 2010-02-11Imprint apparatus, imprint method, and article manufacturing method
#47 | 2009-11-19Surface shape measurement apparatus and exposure apparatus
#48 | 2009-11-19Imprint apparatus, imprint method, and mold for imprint
#49 | 2009-09-03Surface shape measuring apparatus, exposure apparatus, and device manufacturing method
#50 | 2009-06-18Mold, imprint method, and process for producing a chip
#51 | 2009-06-18Process for producing a chip using a mold
#52 | 2009-05-28Alignment method, exposure method, pattern forming method, and exposure apparatus
#53 | 2009-04-30Alignment method, imprint method, alignment apparatus, and position measurement method
#54 | 2009-04-23GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS
#55 | 2008-11-20Information processing apparatus for interference signal processing
#56 | 2008-05-01Imprint apparatus, imprint method, and mold for imprint
#57 | 2008-03-27Imprint apparatus and imprint method including dual movable image pick-up device
#58 | 2007-10-18Pattern transfer apparatus, imprint apparatus, and pattern transfer method
#59 | 2007-10-11Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatus
#60 | 2007-08-16Mold, imprint method, and process for producing chip
#61 | 2007-07-05Method and program for calculating exposure dose and focus position in exposure apparatus, and device manufacturing method
#62 | 2007-04-26MOLD AND IMPRINT APPARATUS
#63 | 2007-02-15Exposure apparatus
#64 | 2007-01-25Surface position measuring method, exposure apparatus, and device manufacturing method
#65 | 2007-01-11Imaging optical system and exposure apparatus
#66 | 2005-11-24Position detecting device and position detecting method
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