München
Germany
4
2023-08-24
The entities that hold a legal rights for patent applications filed by inventor WIELAND Robert:
Robert WIELAND from München, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
ELECTROSTATIC MICRO-PUMP AND A PROCESS TO PRODUCE AN ELECTROSTATIC MICRO-PUMP
#2 | 2019-08-08APPARATUS AND METHOD FOR ANISOTROPIC DRIE ETCHING WITH FLUORINE GAS MIXTURE
#3 | 2018-06-14Process for etching, and chamber cleaning and a gas therefor
#4 | 2008-10-02Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement
2213695 ⎘