Toyama
Japan
9
2025-10-02
The entities that hold a legal rights for patent applications filed by inventor HATTA Hiroki:
Hiroki HATTA from Toyama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
#2 | 2025-07-03Substrate Processing Apparatus, Gas Supply Assembly, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-Readable Recording Medium
#3 | 2025-01-09Substrate Processing Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
#4 | 2023-12-21METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
#5 | 2023-03-23SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
#6 | 2021-10-28METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
#7 | 2021-04-29Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device
#8 | 2018-06-21Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
#9 | 2017-11-30Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
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