Thomas Monz

City:

Schlierbach

Country:

Germany

Published Applications:

Last publication date:

2026-04-30

Top Assignees for applications by Thomas Monz

The entities that hold a legal rights for patent applications filed by inventor Monz Thomas:

Carl Zeiss SMT GmbH 2 Oberkochen, Germany
DEUTSCHES ZENTRUM FUR LUFT-UND RAUMFAHRT E.V. 1 Koln, Germany
Dürr Systems AG 1 Bietigheim-Bissingen, Germany

Recent patent applications by Monz Thomas

Thomas Monz from Schlierbach, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-30

US20260118779A1

Physics

MIRROR SYSTEM, METHOD FOR OPERATING A MIRROR SYSTEM AND PROJECTION LENS OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

#2 | 2026-04-30

US20260118777A1

Physics

NON-CONTACT TEMPERATURE SENSOR FOR A MIRROR, PROJECTION LENS AND METHOD FOR MEASURING THE TEMPERATURE OF A MIRROR

#3 | 2026-03-26

US20260086318A1

Physics

COMPONENT HAVING A HOLLOW STRUCTURE, AND OPTICAL ASSEMBLY

#4 | 2024-10-03

US20240329285A1

Physics

METHOD AND APPARATUS FOR PRODUCING AT LEAST ONE HOLLOW STRUCTURE, MIRROR, EUV LITHOGRAPHY SYSTEM, FLUID FEED APPARATUS AND METHOD FOR FEEDING A FLUID

#5 | 2023-10-12

US20230324648A1

Physics

OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM

#6 | 2023-08-03

US20230243644A1

Physics

PRODUCTION METHOD AND MEASUREMENT METHOD

#7 | 2023-06-08

US20230176492A1

Physics

OPTICAL SYSTEM AND METHOD OF OPERATING AN OPTICAL SYSTEM

#8 | 2023-03-16

US20230082054A1

Physics

DEVICE AND METHOD FOR CONTROLLING THE TEMPERATURE OF ELEMENTS IN MICRO-LITHOGRAPHIC PROJECTION EXPOSURE SYSTEMS

#9 | 2018-08-23

US20180238549A1

Mechanical engineering

BURNERS HAVING FUEL PLENUMS

#10 | 2015-04-02

US20150089954A1

Mechanical engineering

Burners having fuel plenums

InventorID:

2275675 ⎘