Michael Carl

City:

Aalen

Country:

Germany

Published Applications:

Last publication date:

2026-02-12

Top Assignees for applications by Michael Carl

The entities that hold a legal rights for patent applications filed by inventor Carl Michael:

Michael Carl from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

APPARATUS AND METHOD FOR CHECKING A COMPONENT, AND LITHOGRAPHY SYSTEM

MIRROR ELEMENT, LITHOGRAPHY SYSTEM, AND METHOD FOR PROVIDING A MIRROR ELEMENT

Method and device for characterizing the surface shape of an optical element

Method and assembly for characterizing a mask or a wafer for microlithography

Optical system of a microlithographic projection exposure system or of a wafer inspection system

InventorID:

2287867 ⎘