Santa Clara, California
United States
5
2018-09-20
The entities that hold a legal rights for patent applications filed by inventor LE Daniel:
Daniel LE from Santa Clara, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Atomic layer etching of silicon nitride
#2 | 2017-10-03Hydrogen activated atomic layer etching
#3 | 2010-10-14Method for low-K dielectric etch with reduced damage
#4 | 2005-12-15Line edge roughness reduction for trench etch
#5 | 2005-05-12Line edge roughness reduction for trench etch
2300795 ⎘