Thomas Frank

City:

Jena

Country:

Germany

Published Applications:

Last publication date:

2025-12-04

Top Assignees for applications by Thomas Frank

The entities that hold a legal rights for patent applications filed by inventor Frank Thomas:

Thomas Frank from Jena, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

MASK METROLOGY MEASURING DEVICE AND METHOD FOR EXAMINING A PHOTOMASK

MEASUREMENT APPARATUS, METHOD FOR OPERATING A MASK-METROLOGY MEASUREMENT APPARATUS, AND COMPUTER PROGRAM PRODUCT

Method and apparatus for characterizing a microlithographic mask

Device and method for characterizing a microlithographic mask

Device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography

Method and device for characterizing a mask for microlithography

InventorID:

2398812 ⎘