Augsburg
Germany
5
2025-05-22
The entities that hold a legal rights for patent applications filed by inventor Six Stephan:
Stephan Six from Augsburg, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
LENS ELEMENT FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS DESIGNED FOR OPERATION IN THE DUV, AND METHOD AND ARRANGEMENT FOR FORMING AN ANTIREFLECTION LAYER
#2 | 2024-06-20DUV LITHOGRAPHY SYSTEM
#3 | 2024-05-23METHOD FOR DEPOSITING A LAYER OPTICAL ELEMENT, AND OPTICAL ASSEMBLY FOR THE DUV WAVELENGTH RANGE
#4 | 2020-01-30Method for determining material removal and device for the beam machining of a workpiece
#5 | 2019-01-31Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
2417952 ⎘