Boppard
Germany
8
2017-03-23
The entities that hold a legal rights for patent applications filed by inventor Mallmann Joerg:
Joerg Mallmann from Boppard, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Microlithographic projection exposure apparatus and measuring device for a projection lens
#2 | 2016-05-12MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#3 | 2013-05-16Exposure apparatus and measuring device for a projection lens
#4 | 2010-06-10Exposure apparatus and measuring device for a projection lens
#5 | 2010-02-25MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#6 | 2008-12-25MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#7 | 2008-12-18MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
#8 | 2007-03-29MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS
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