Aalen
Germany
13
2026-05-07
The entities that hold a legal rights for patent applications filed by inventor Schellhorn Uwe:
Uwe Schellhorn from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
APPARATUS AND METHOD FOR THERMALLY TREATING A BODY TO BE THERMALLY TREATED
#2 | 2014-01-23Device and method for the optical measurement of an optical system by using an immersion fluid
#3 | 2013-05-16Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatus
#4 | 2012-05-10DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID
#5 | 2010-09-23Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stage
#6 | 2010-06-17APPARATUS AND METHOD FOR MEASURING THE POSITIONS OF MARKS ON A MASK
#7 | 2010-04-22Method for determination of residual errors
#8 | 2009-10-15Device and method for the optical measurement of an optical system by using an immersion fluid
#9 | 2009-01-22DEVICE AND METHOD FOR THE OPTICAL MEASUREMENT OF AN OPTICAL SYSTEM BY USING AN IMMERSION FLUID
#10 | 2006-10-10Phase shifting wavefront interference method
#11 | 2006-01-12Method for determining distortion and/or image surface
#12 | 2005-11-03Device and method for the optical measurement of an optical system by using an immersion fluid
#13 | 2005-06-09Moire method and measuring system for measuring the distortion of an optical imaging system
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