Tokyo
Japan
24
2020-10-01
The entities that hold a legal rights for patent applications filed by inventor KIUCHI Tohru:
Tohru KIUCHI from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Substrate processing apparatus, processing apparatus, and method for manufacturing device
#2 | 2020-04-16Substrate case and substrate accommodation apparatus
#3 | 2020-03-19Substrate processing apparatus, processing apparatus, and method for manufacturing device
#4 | 2019-10-31Substrate processing apparatus, processing apparatus, and method for manufacturing device
#5 | 2019-01-24Substrate processing apparatus, processing apparatus, and method for manufacturing device
#6 | 2018-09-20Substrate processing apparatus, processing apparatus, and method for manufacturing device
#7 | 2017-06-15Substrate processing apparatus, processing apparatus, and method for manufacturing device
#8 | 2015-08-27Substrate processing apparatus, processing apparatus, and method for manufacturing device
#9 | 2014-10-02Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
#10 | 2013-02-14MOTOR APPARATUS, METHOD OF DRIVING ROTOR, AND ROBOT APPARATUS
#11 | 2013-01-10Exposure apparatus, exposure method, and device manufacturing method
#12 | 2011-06-30Substrate case and substrate accommodation apparatus
#13 | 2011-04-14Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
#14 | 2011-04-07Immersion exposure apparatus and immersion exposure method, and device manufacturing method
#15 | 2011-01-20Pattern formation apparatus, pattern formation method, and device manufacturing method
#16 | 2010-10-21Exposure apparatus, exposure method, and method of manufacturing device
#17 | 2010-06-10Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display element
#18 | 2010-04-29Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrate
#19 | 2009-10-22Exposure apparatus, exposure method, and device manufacturing method
#20 | 2009-08-20Exposure apparatus, exposure method, and device manufacturing method
#21 | 2008-12-04Exposure method and electronic device manufacturing method
#22 | 2008-09-04Exposure apparatus, exposure method, and device manufacturing method
#23 | 2008-03-20Immersion exposure apparatus and immersion exposure method, and device manufacturing method
#24 | 2006-09-21Exposure apparatus and device manufacturing method
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