Chi YANG

City:

Hsinchu

Country:

Taiwan

Published Applications:

Last publication date:

2025-07-03

Top Assignees for applications by Chi YANG

The entities that hold a legal rights for patent applications filed by inventor YANG Chi:

Chi YANG from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:

WIDTH ADJUSTMENT OF EUV RADIATION BEAM

LITHOGRAPHY SYSTEM WITH NON-INVASIVE MONITORING AND METHODS

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET RADIATION

LITHOGRAPHY SYSTEM AND METHODS

LITHOGRAPHY SYSTEM AND METHODS

Width adjustment of EUV radiation beam

Collector pellicle

InventorID:

2474263 ⎘