Hideji SHIBATA

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2013-05-16

Top Assignees for applications by Hideji SHIBATA

The entities that hold a legal rights for patent applications filed by inventor SHIBATA Hideji:

Hideji SHIBATA from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Semiconductor device manufacturing method and substrate manufacturing method of forming silicon carbide films on the substrate

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE MANUFACTURING METHOD

InventorID:

248097 ⎘