Hanau
Germany
43
2026-02-19
The entities that hold a legal rights for patent applications filed by inventor Budach Michael:
Michael Budach from Hanau, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
REMOTE-PLASMA ELECTRON-INDUCED MASK REPAIR
#2 | 2025-12-25CREATING AN ELECTRIC FIELD WHEN PROCESSING A LITHOGRAPHY OBJECT
#3 | 2025-05-29METHOD AND DEVICE FOR CORRECTING IMAGE ERRORS WHEN SCANNING A CHARGED PARTICLE BEAM OVER A SAMPLE
#4 | 2025-05-08METHOD FOR EXAMINING A BLANK OF A MICROLITHOGRAPHIC PHOTOMASK
#5 | 2025-05-01METHOD FOR PROCESSING A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK
#6 | 2024-09-19METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
#7 | 2024-09-19METHOD AND APPARATUS FOR CALIBRATING AN OPERATION ON A PHOTOMASK
#8 | 2024-07-04METHOD AND APPARATUS FOR DETERMINING OPTICAL PROPERTIES OF DEPOSITION MATERIALS USED FOR LITHOGRAPHIC MASKS
#9 | 2024-03-14Mesh Integrity Check
#10 | 2024-02-29METHOD AND APPARATUS FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK
#11 | 2023-07-27APPARATUS FOR ANALYZING AND/OR PROCESSING A SAMPLE WITH A PARTICLE BEAM AND METHOD
#12 | 2023-03-16METHOD FOR PARTICLE BEAM-INDUCED PROCESSING OF A DEFECT OF A MICROLITHOGRAPHIC PHOTOMASK
#13 | 2022-10-20Apparatus and method for determining a position of an element on a photolithographic mask
#14 | 2022-10-06Method and apparatuses for disposing of excess material of a photolithographic mask
#15 | 2022-10-06Method and apparatuses for disposing of excess material of a photolithographic mask
#16 | 2022-09-29METHOD, DEVICE AND COMPUTER PROGRAM FOR REPAIRING A MASK DEFECT
#17 | 2022-09-22METHOD AND APPARATUSES FOR DISPOSING OF EXCESS MATERIAL OF A PHOTOLITHOGRAPHIC MASK
#18 | 2022-06-09Apparatus and method for examining and/or processing a sample
#19 | 2021-08-12Device and method for analyzing a defect of a photolithographic mask or of a wafer
#20 | 2021-05-06Devices and methods for examining and/or processing an element for photolithography
#21 | 2021-04-15Apparatus and method for examining and/or processing a sample
#22 | 2020-08-06Apparatus and method for repairing a photolithographic mask
#23 | 2020-07-23Apparatus and method for determining a position of an element on a photolithographic mask
#24 | 2020-04-02Method and apparatuses for disposing of excess material of a photolithographic mask
#25 | 2020-01-02Method and apparatus for analyzing a defective location of a photolithographic mask
#26 | 2019-01-31Methods and devices for examining an electrically charged specimen surface
#27 | 2018-05-31Beam blanker and method for blanking a charged particle beam
#28 | 2018-04-19METHOD AND APPARATUS FOR ANALYZING AND FOR REMOVING A DEFECT OF AN EUV PHOTOMASK
#29 | 2017-10-12Device and method for analysing a defect of a photolithographic mask or of a wafer
#30 | 2017-03-02Methods and devices for examining an electrically charged specimen surface
#31 | 2016-11-24Apparatus and method for examining a surface of a mask
#32 | 2016-05-19Method and device for determining a reference point of an orientation marking on a substrate of a photolithographic mask in an automated manner
#33 | 2015-12-31Scanning particle microscope and method for determining a position change of a particle beam of the scanning particle microscope
#34 | 2014-09-11METHOD AND APPARATUS FOR PROTECTING A SUBSTRATE DURING PROCESSING BY A PARTICLE BEAM
#35 | 2014-06-12Method and apparatus for analyzing and for removing a defect of an EUV photomask
#36 | 2014-01-30Apparatus and method for investigating an object
#37 | 2013-06-20Method and apparatus for analyzing and/or repairing of an EUV mask defect
#38 | 2013-05-23Method for determining the performance of a photolithographic mask
#39 | 2011-09-01Apparatus and method for investigating and/or modifying a sample
#40 | 2010-11-25METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES
#41 | 2010-06-24Determining a repairing form of a defect at or close to an edge of a substrate of a photo mask
#42 | 2010-05-13Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
#43 | 2008-05-01Electron microscope for inspecting and processing of an object with miniaturized structures and method thereof
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