Breda
Netherlands
5
2013-05-30
The entities that hold a legal rights for patent applications filed by inventor BALTUSSEN Sander:
Sander BALTUSSEN from Breda, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and system for realizing a vacuum in a vacuum chamber
#2 | 2011-03-03Lithography Machine and Substrate Handling Arrangement
#3 | 2011-02-24CHARGED PARTICLE LITHOGRAPHY APPARATUS AND METHOD OF GENERATING VACUUM IN A VACUUM CHAMBER
#4 | 2010-10-28Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber
#5 | 2010-10-28Method and arrangement for realizing a vacuum in a vacuum chamber
2595165 ⎘