Pfullingen
Germany
10
2019-05-09
The entities that hold a legal rights for patent applications filed by inventor Grosse Axel:
Axel Grosse from Pfullingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for bonding wafers eutectically, and a wafer composite
#2 | 2015-08-20LAYER STRUCTURE FOR A MICROMECHANICAL COMPONENT
#3 | 2014-11-06Micromechanical component and method for producing a micromechanical component having a thin-layer cap
#4 | 2013-01-10Component having a micromechanical microphone structure, and method for manufacturing same
#5 | 2011-02-10Sensor element and method for operating a sensor element
#6 | 2011-01-13Micromechanical component and method for producing a micromechanical component having a thin-layer cap
#7 | 2010-10-14Method for attaching a first carrier device to a second carrier device and micromechanical components
#8 | 2009-07-09Method for sealing an opening
#9 | 2009-07-02MICROMECHANICAL STRUCTURE HAVING A SUBSTRATE AND A THERMOELEMENT, TEMPERATURE SENSOR AND/OR RADIATION SENSOR, AND METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE
#10 | 2009-04-09Micromechanical component having a cap having a closure
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