Pan Shen

City:

Beijing

Country:

China

Published Applications:

Last publication date:

2014-01-02

Top Assignees for applications by Pan Shen

The entities that hold a legal rights for patent applications filed by inventor Shen Pan:

Pan Shen from Beijing, CN has applied for patents for these inventions. The list has both pending applications and granted patents:

Measuring device for measuring film thickness of silicon wafer

WAFER TRANSFER DEVICE FOR CHEMICAL MECHANICAL POLISHING APPARATUS

Method for measuring thickness of film on wafer edge

Chemical mechanical polishing machine and chemical mechanical polishing apparatus comprising the same

PAD CONDITIONER HEAD FOR CONDITIONING A POLISHING PAD

InventorID:

262775 ⎘