Tokyo
Japan
19
2023-12-28
The entities that hold a legal rights for patent applications filed by inventor Emoto Jun:
Jun Emoto from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
GAS PURGE UNIT AND THE LOAD PORT DEVICE
#2 | 2019-06-06Gas purge unit and load port apparatus
#3 | 2017-01-26Gas purge unit, load port apparatus, and installation stand for purging container
#4 | 2017-01-26Gas purge apparatus, load port apparatus, installation stand for purging container, and gas purge method
#5 | 2016-07-21Gas purge unit and gas purge apparatus
#6 | 2016-02-11Gas purge unit, load port apparatus, and installation stand for purging container
#7 | 2015-08-27Pod and purge system using the same
#8 | 2015-07-30LOAD PORT APPARATUS
#9 | 2015-07-09LOAD PORT APPARATUS
#10 | 2014-12-11Load port unit and EFEM system
#11 | 2014-06-12LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER, AND SUBSTRATE PROCESSING METHOD USING THE SAME
#12 | 2013-02-21Purge device and load port apparatus including the same
#13 | 2013-01-10Load port apparatus
#14 | 2010-11-18Lid opening/closing system for closed container and substrate processing method using same
#15 | 2009-08-27Closed container and control system for closed container
#16 | 2009-02-05Method of processing an object in a container and lid opening/closing system used in the method
#17 | 2009-02-05Lid opening/closing system for closed container and substrate processing method using same
#18 | 2007-10-04Pod clamping unit load port equipped with pod clamping unit and mini environment system including pod and load port
#19 | 2005-05-05Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
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