Ming-Te Chen

FIELD EFFECT TRANSISTOR WITH STRAINED CHANNELS AND METHOD

GATE STACK TREATMENT

FIELD EFFECT TRANSISTOR WITH STRAINED CHANNELS AND METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES AND SEMICONDUCTOR DEVICES

Gate stack treatment

Semiconductor structure and manufacturing method of the same

Method of manufacturing semiconductor devices and semiconductor devices

Method of manufacturing semiconductor devices and semiconductor devices

Gate stack treatment

Method of manufacturing a semiconductor device and a semiconductor device

Method of manufacturing semiconductor devices and semiconductor devices

Method of manufacturing semiconductor devices using a capping layer in forming gate electrode and semiconductor devices

Gate stack treatment

High-throughput system and method for post-implantation single wafer warm-up

Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator

Method of forming finFET gate oxide

Processing apparatus, ion implantation apparatus and ion implantation method

Adjusting intensity of laser beam during laser operation on a semiconductor device

Method and apparatus for cooling wafer in ion implantation process

Method of forming a shallow trench isolation structure

High-throughput system and method for post-implantation single wafer warm-up

Multi-platen ion implanter and method for implanting multiple substrates simultaneously

Processing apparatus and ion implantation apparatus

Adjusting intensity of laser beam during laser operation on a semiconductor device

Wafer cleaning

Atomic layer deposition apparatus and method

Collar removing clamp for HDP chamber