Tokyo
Japan
15
2015-03-12
The entities that hold a legal rights for patent applications filed by inventor ODE Hiroyuki:
Hiroyuki ODE from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Semiconductor device manufacturing method
#2 | 2014-03-27METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#3 | 2014-02-06Method of manufacturing semiconductor device
#4 | 2013-06-13Semiconductor device and method for manufacturing the same
#5 | 2012-03-22VAPORIZING AND FEED APPARATUS AND VAPORIZING AND FEED METHOD
#6 | 2011-12-22Devices with covering layer and filler
#7 | 2011-10-06Method of manufacturing semiconductor device
#8 | 2009-09-10SUPERCRITICAL FILM DEPOSITION APPARATUS
#9 | 2009-04-09Apparatus including column having hollow part filled with filler and solid film-formation material
#10 | 2009-01-22METHOD OF MANUFACTURING OF SUBSTRATE
#11 | 2008-12-18Film deposition processing apparatus and film deposition processing method
#12 | 2008-08-28BATCH DEPOSITION SYSTEM USING A SUPERCRITICAL DEPOSITION PROCESS
#13 | 2008-01-24Film formation apparatus, precursor introduction method and film formation method
#14 | 2007-05-31Method for manufacturing semiconductor silicon substrate and apparatus for manufacturing the same
#15 | 2007-03-29Method of manufacturing semiconductor silicon substrate
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