Heribert Weber

METHOD FOR PRODUCING A MAGNETIC SENSOR

METHOD FOR MAKING A HOLLOW STRUCTURE, AND MICROMECHANICAL SENSOR HAVING SUCH A HOLLOW STRUCTURE

MICROMECHANICAL PRESSURE SENSOR HAVING AT LEAST TWO MEMBRANES FOR DETERMINING A PRESSURE VALUE, AND CORRESPONDING METHOD

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

MICROMECHANICAL PRESSURE SENSOR ELEMENT

MICROMECHANICAL COMPONENT

METHOD FOR PRODUCING A PARTICLE PROTECTION ELEMENT, IN PARTICULAR A PARTICLE FILTER, FOR A MEMBRANE OF A PRESSURE SENSOR, PARTICLE PROTECTION ELEMENT, METHOD FOR PRODUCING A PRESSURE SENSOR, AND PRESSURE SENSOR

METHOD FOR FORMING A LAYER STRUCTURE SURROUNDING AT LEAST ONE RECESS, AND DEVICE WITH A LAYER STRUCTURE

MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE

SENSOR DEVICE AND METHOD FOR DETECTING THE INTERNAL PRESSURE AND/OR A CHANGE IN THE INTERNAL PRESSURE IN A GAS-TIGHT INTERNAL VOLUME OF A HOUSING COMPONENT

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

MICROMECHANICAL COMPONENT

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE

Micromechanical component for a sensor device or microphone device

Micromechanical component for a sensor device having a capacitor sealing structure

MEMS capacitive sensor including improved contact separation

Production method for a micromechanical component

Micromechanical component for a capacitive pressure sensor device

Method for sealing entries in a MEMS element

Micromechanical component and method for manufacturing a micromechanical component

MICROMECHANICAL COMPONENT FOR A SENSOR OR MICROPHONE DEVICE

Micromechanical component for a sensor device or microphone device

Micromechanical pressure sensor device including a diaphragm system and corresponding manufacturing method

Micromechanical component for a capacitive pressure sensor device

Bonding pad layer system, gas sensor and method for manufacturing a gas sensor

METHOD FOR THE MICRO-STRUCTURED APPLICATION OF A FLUID OR PASTE ONTO A SURFACE

Method for manufacturing a micromechanical component

Dispersion for the metallization of contactings

COMPONENT HAVING A VIA AND METHOD FOR MANUFACTURING IT

Micromechanical component for a capacitive sensor device, and manufacturing method for a micromechanical component for a capacitive sensor device

Method for producing a metal structure in a semiconductor substrate

ASIC element including a via

Component in the form of a wafer level package and method for manufacturing same

COMPONENT INCLUDING MEANS FOR REDUCING ASSEMBLY-RELATED MECHANICAL STRESSES AND METHODS FOR MANUFACTURING SAME

Hybrid integrated component

Micromechanical component

Method for manufacturing a cap for a MEMS component, and hybrid integrated component having such a cap

Magnetically drivable micromirror

Hybrid integrated pressure sensor component

Component having through-hole plating, and method for its production

Hybrid integrated component and method for the manufacture thereof

Hybridly integrated component and method for the production thereof

Hybrid integrated component and method for the manufacture thereof

Method for manufacturing a hybrid integrated component

COMPONENT HAVING A THROUGH-CONNECTION

Method for bonding two silicon substrates, and a correspondeing system of two silicon substrates

Component having a via and method for manufacturing it

Method for creating monocrystalline piezoresistors

Method for constructing an electrical circuit, and electrical circuit

Method for producing a micromechanical component having a trench structure for backside contact

Micromechanical component and method for producing a micromechanical component

Method for Producing an Electrical Circuit and Electrical Circuit

Method for filling cavities in wafers, correspondingly filled blind hole and wafer having correspondingly filled insulation trenches

Sensor module

Sensor system, method for operating a sensor system, and method for manufacturing a sensor system

Method for providing and connecting two contact areas of a semiconductor component or a substrate, and a substrate having two such connected contact areas

Method for forming trenches in a semiconductor component

Micromechanical component having an inclined structure and corresponding manufacturing method

Device made of single-crystal silicon

MICROMECHANICAL ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN ACCELERATION SENSOR

Micromechanical component and corresponding production method

Method for attaching a first carrier device to a second carrier device and micromechanical components

Micromechanical component and corresponding production method

Method for producing a micromechanical component having a trench structure for backside contact

Method for producing a micromechanical component having a filler layer and a masking layer

Method for Manufacturing a Diaphragm on a Semiconductor Substrate and Micromechanical Component Having Such a Diaphragm

Micromechanical diaphragm sensor having a double diaphragm

Method for producing a micromechanical component and mircomechanical component

Capacitive acceleration sensor having a movable mass and a spring element

Micromechanical component and method for producing a micromechanical component

Device made of single-crystal silicon

Method for producing a semiconductor component and a semiconductor component produced according to the method

Method for producing optically transparent regions in a silicon substrate

Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method

Microstructured chemical sensor

Micromechanical component and corresponding manufacturing method

Gas sensor and method for the production thereof

Semiconductor component and a method for producing the same

Method of producing a semiconductor sensor component

Membrane sensor

Pressure sensor featuring pressure loading of the fastening element

Method for producing micromechanic sensors and sensors produced by said method

Method for production of a semiconductor component and a semiconductor component produced by said method

Micromechanical component and suitable method for its manufacture

Method and micromechanical component

Method for producing a semiconductor component and a semiconductor component produced according to the method

Sensor assembly for measuring a gas concentration

Micromechanical component

Micromechanical structural element having a diaphragm and method for producing such a structural element

Semiconductor element and method for its production

Method for producing cavities having optically transparent wall

Sensor element

Micromechanical component and pressure sensor having a component of this type