Gomaringen
Germany
17
2020-06-25
The entities that hold a legal rights for patent applications filed by inventor Graf Eckhard:
Eckhard Graf from Gomaringen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Micromechanical device and method for manufacturing a micromechanical device
#2 | 2018-12-06MEMS component having two different internal pressures
#3 | 2015-05-21COMPONENT HAVING A VIA AND METHOD FOR MANUFACTURING IT
#4 | 2013-06-13Component having a via and method for manufacturing it
#5 | 2012-03-01Method for producing a micromechanical component having a trench structure for backside contact
#6 | 2012-02-16Method for filling cavities in wafers, correspondingly filled blind hole and wafer having correspondingly filled insulation trenches
#7 | 2012-02-09Sensor module
#8 | 2011-07-14Method for establishing and closing a trench of a semiconductor component
#9 | 2010-06-03Method for producing a micromechanical component having a trench structure for backside contact
#10 | 2010-04-15Method for producing a micromechanical component having a filler layer and a masking layer
#11 | 2008-06-12Micromechanical component having multiple caverns, and manufacturing method
#12 | 2006-12-26Micromechanical component as well as a method for producing a micromechanical component
#13 | 2005-10-18Method for joining a silicon plate to a second plate
#14 | 2005-10-04Method for manufacturing a micromechanical component and a component that is manufactured in accordance with the method
#15 | 2005-05-26Method for anodic bonding of wafers and device
#16 | 2005-04-05Micromechanical component as well as a method for producing a micromechanical component
#17 | 2005-03-03Micromechanical cap structure and a corresponding production method
281883 ⎘