Karlsruhe
Germany
3
2016-07-14
The entities that hold a legal rights for patent applications filed by inventor GOEPPERT Markus:
Markus GOEPPERT from Karlsruhe, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus for determining an optical property of an optical imaging system
#2 | 2014-05-01Measuring system
#3 | 2013-06-13Method and apparatus for qualifying optics of a projection exposure tool for microlithography
283638 ⎘