Mie
Japan
7
2014-07-10
The entities that hold a legal rights for patent applications filed by inventor OKAMOTO Yosuke:
Yosuke OKAMOTO from Mie, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
EUV mask
#2 | 2014-03-06Exposure apparatus, exposure method, and method of manufacturing semiconductor device
#3 | 2014-03-06Pattern forming method, positional deviation measuring method and photomask
#4 | 2013-11-07Dose-data generating apparatus
#5 | 2013-09-26Mask and method for fabricating semiconductor device
#6 | 2013-06-13OVERLAY MEASURING METHOD
#7 | 2012-03-15Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device
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