Shanghai
China
9
2022-12-29
The entities that hold a legal rights for patent applications filed by inventor LU Yunjun:
Yunjun LU from Shanghai, CN has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry
#2 | 2022-11-17Multi-channel device and method for measuring distortion and magnification of objective lens
#3 | 2022-09-22Apparatus and method for detecting wavefront aberration of objective lens
#4 | 2022-03-10Method for high-accuracy wavefront measurement base on grating shearing interferometry
#5 | 2021-07-08Light intensity fluctuation-insensitive projection objective wave aberration detection device and detection method thereof
#6 | 2021-01-28Device and method for detecting projection objective wave-front aberration
#7 | 2020-09-17Method for detecting wavefront aberration for optical imaging system based on grating shearing interferometer
#8 | 2020-09-17Method for wavefront measurement of optical imaging system based on grating shearing interferometry
#9 | 2017-05-23Device for measuring point diffraction interferometric wavefront aberration and method for detecting wave aberration
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