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Inventor profile of:

Hidehiro Yanai

City:

Toyama

Country:

Japan

Published Applications:

Last publication date:

2024-06-27

Top Assignees for applications by Hidehiro Yanai

The entities that hold a legal rights for patent applications filed by inventor Yanai Hidehiro:

HITACHI KOKUSAI ELECTRIC INC. 16 Tokyo, Japan
KOKUSAI ELECTRIC CORPORATION 7 Tokyo, Japan

Recent patent applications by Yanai Hidehiro

Hidehiro Yanai from Toyama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2024-06-27

US20240212989A1

Electricity

SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#2 | 2021-11-04

US20210343507A1

Electricity

Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus

#3 | 2021-03-18

US20210079525A1

Chemistry; metallurgy

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

#4 | 2020-12-03

US20200381221A1

Electricity

Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus

#5 | 2018-05-24

US20180144908A1

Electricity

Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus

#6 | 2016-12-29

US20160379848A1

Electricity

Substrate Processing Apparatus

#7 | 2016-01-14

US20160010210A1

Chemistry; metallurgy

Substrate processing apparatus

#8 | 2015-12-24

US20150371832A1

Electricity

Plasma processing apparatus and method of manufacturing semiconductor device

#9 | 2015-08-06

US20150221503A1

Electricity

Method of manufacturing semiconductor device

#10 | 2015-07-30

US20150214044A1

Electricity

Substrate processing apparatus and method of manufacturing semiconductor device

#11 | 2015-03-24

US14229151

Electricity

Substrate processing apparatus and method of manufacturing semiconductor device

#12 | 2015-01-06

US14229284

Electricity

Substrate processing apparatus and method of manufacturing semiconductor device

#13 | 2014-01-02

US20140004710A1

Electricity

Substrate processing apparatus, substrate supporter and method of manufacturing semiconductor device

#14 | 2013-01-10

US20130012035A1

Electricity

Substrate processing apparatus and method of manufacturing semiconductor device

#15 | 2012-12-27

US20120329290A1

Electricity

Substrate Placement Stage, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

#16 | 2012-05-31

US20120132228A1

Electricity

Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus

#17 | 2010-06-17

US20100150687A1

Electricity

Substrate processing apparatus

#18 | 2010-03-18

US20100068895A1

Electricity

Substrate processing apparatus and substrate processing method

#19 | 2010-03-18

US20100068414A1

Electricity

Substrate processing apparatus and substrate processing method

#20 | 2010-01-19

US11547137

Substrate processing apparatus, and method for manufacturing semiconductor device

#21 | 2007-11-15

US20070264840A1

Chemistry; metallurgy

Substrate processing apparatus and method of manufacturing semiconductor device

InventorID:

28799 ⎘