Abtenau
Austria
17
2026-02-19
The entities that hold a legal rights for patent applications filed by inventor WALLINGER Martin:
Martin WALLINGER from Abtenau, AT has applied for patents for these inventions. The list has both pending applications and granted patents:
MONOLITHIC LAYERED HEATER FOR THIN-WALLED SUBSTRATES
#2 | 2024-11-14THERMAL SYSTEM WITH A TEMPERATURE LIMITING DEVICE
#3 | 2023-05-04Thermal diffuser for a semiconductor wafer holder
#4 | 2023-04-13SHAPED ELECTRICAL INTERCONNECTIONS FOR MULTI-LAYER HEATER CONSTRUCTIONS
#5 | 2022-08-25High dynamic temperature control system
#6 | 2021-03-04Thermal diffuser for a semiconductor wafer holder
#7 | 2020-10-15Thermal system with a temperature limiting device
#8 | 2020-10-08Method of manufacturing and adjusting a resistive heater
#9 | 2019-06-06Layered heater system having conductive overlays
#10 | 2019-02-07Layered heater system having conductive overlays
#11 | 2019-01-24Temperature detection and control system for layered heaters
#12 | 2015-09-17Temperature detection and control system for layered heaters
#13 | 2015-09-03Layered heater system having conductive overlays
#14 | 2013-09-26Temperature detection and control system for layered heaters
#15 | 2013-06-20HIGH DYNAMIC TEMPERATURE CONTROL SYSTEM
#16 | 2011-11-03LAYERED HEATER SYSTEM HAVING CONDUCTIVE OVERLAYS
#17 | 2008-04-03LAYERED HEATER SYSTEM HAVING CONDUCTIVE OVERLAYS
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