Chi-Ching LO

City:

Hsinchu

Country:

Taiwan

Published Applications:

Last publication date:

2014-09-18

Top Assignees for applications by Chi-Ching LO

The entities that hold a legal rights for patent applications filed by inventor LO Chi-Ching:

Chi-Ching LO from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:

High density plasma reactor with multiple top coils

Electrostatic chuck assembly having disassembling device

InventorID:

2962444 ⎘