Roman Klein

City:

Berlin

Country:

Germany

Published Applications:

Last publication date:

2019-08-29

Top Assignees for applications by Roman Klein

The entities that hold a legal rights for patent applications filed by inventor Klein Roman:

Roman Klein from Berlin, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Optical measurement device

Optical element and method for its manufacture as well as lithography apparatus and method for manufacturing a semiconductor device

Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements

Device, EUV-lithographic device and method for preventing and cleaning contamination on optical elements

InventorID:

2979977 ⎘