Florian Herold

City:

Aalen

Country:

Germany

Published Applications:

Last publication date:

2023-03-16

Top Assignees for applications by Florian Herold

The entities that hold a legal rights for patent applications filed by inventor Herold Florian:

Florian Herold from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Projection exposure apparatus for semiconductor lithography with a vibration damper and method for designing a vibration damper

Optical element, in particular for a microlithographic projection exposure apparatus

InventorID:

3003139 ⎘