Joachim KALDEN

City:

Essingen

Country:

Germany

Published Applications:

Last publication date:

2022-10-27

Top Assignees for applications by Joachim KALDEN

The entities that hold a legal rights for patent applications filed by inventor KALDEN Joachim:

Joachim KALDEN from Essingen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

ILLUMINATION OPTICAL SYSTEM FOR EUV PROJECTION LITHOGRAPHY

Method for correcting a reflective optical element for the wavelength range between 5 nm and 20 nm

InventorID:

3051698 ⎘