Katy, Texas
United States
16
2018-05-24
The entities that hold a legal rights for patent applications filed by inventor Xu Lin:
Lin Xu from Katy, US has applied for patents for these inventions. The list has both pending applications and granted patents:
PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING
#2 | 2018-05-10COATING SYSTEM AND METHOD FOR COATING INTERIOR FLUID WETTED SURFACES OF A COMPONENT OF A SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
#3 | 2018-02-15Method for conditioning silicon part
#4 | 2017-02-09PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING
#5 | 2017-01-19USE OF SINTERED NANOGRAINED YTTRIUM-BASED CERAMICS AS ETCH CHAMBER COMPONENTS
#6 | 2016-12-29USE OF PLASMA-RESISTANT ATOMIC LAYER DEPOSITION COATINGS TO EXTEND THE LIFETIME OF POLYMER COMPONENTS IN ETCH CHAMBERS
#7 | 2016-12-29USE OF ATOMIC LAYER DEPOSITION COATINGS TO PROTECT BRAZING LINE AGAINST CORROSION, EROSION, AND ARCING
#8 | 2015-11-26Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
#9 | 2015-07-02COMPONENT OF A PLASMA PROCESSING APPARATUS INCLUDING AN ELECTRICALLY CONDUCTIVE AND NONMAGNETIC COLD SPRAYED COATING
#10 | 2015-07-02Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus
#11 | 2014-10-23COLD SPRAY BARRIER COATED COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF
#12 | 2014-10-02Dense oxide coated component of a plasma processing chamber and method of manufacture thereof
#13 | 2014-09-18Corrosion resistant aluminum coating on plasma chamber components
#14 | 2014-05-08PALLADIUM PLATED ALUMINUM COMPONENT OF A PLASMA PROCESSING CHAMBER AND METHOD OF MANUFACTURE THEREOF
#15 | 2014-04-24TUNGSTEN CARBIDE COATED METAL COMPONENT OF A PLASMA REACTOR CHAMBER AND METHOD OF COATING
#16 | 2013-06-27Plasma Processing Devices With Corrosion Resistant Components
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