Malschwitz
Germany
3
2012-01-05
The entities that hold a legal rights for patent applications filed by inventor Poock Andre:
Andre Poock from Malschwitz, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and system for excursion monitoring in optical lithography processes in micro device fabrication
#2 | 2010-05-06SELF-CORRECTING SUBSTRATE SUPPORT SYSTEM FOR FOCUS CONTROL IN EXPOSURE SYSTEMS
#3 | 2009-11-05Method of detecting repeating defects in lithography masks on the basis of test substrates exposed under varying conditions
3066920 ⎘