Oberkochen
Germany
10
2012-01-19
The entities that hold a legal rights for patent applications filed by inventor Reisinger Gerd:
Gerd Reisinger from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Projection Exposure System, Beam Delivery System and Method of Generating a Beam of Light
#2 | 2010-08-05Projection objective for microlithography, projection exposure apparatus, projection exposure method and optical correction plate
#3 | 2009-09-10Optical system and method for improving imaging properties thereof
#4 | 2008-09-18Projection exposure system, beam delivery system and method of generating a beam of light
#5 | 2008-02-14Method For Structuring A Substrate Using Multiple Exposure
#6 | 2008-01-10Method of optimizing imaging performance
#7 | 2007-06-14Microlithographic projection exposure apparatus and method for introducing an immersion liquid into an immersion space
#8 | 2007-03-29Optical system and method for improving imaging properties thereof
#9 | 2005-10-27Method of optimizing imaging performance
#10 | 2005-08-30Process for the decontamination of microlithographic projection exposure devices
3075503 ⎘