Nils Haverkamp

City:

Oberkochen

Country:

Germany

Published Applications:

Last publication date:

2025-06-12

Top Assignees for applications by Nils Haverkamp

The entities that hold a legal rights for patent applications filed by inventor Haverkamp Nils:

Nils Haverkamp from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Method and Manufacturing Installation for Producing a Plurality of Workpieces

Illumination system for microlithography

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

Optical integrator for an illumination system of a microlithographic projection exposure apparatus

InventorID:

3081037 ⎘