Pleasanton, California
United States
20
2012-02-09
The entities that hold a legal rights for patent applications filed by inventor Loewenhardt Peter:
Peter Loewenhardt from Pleasanton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for preventing corrosion of plasma-exposed yttria-coated constituents
#2 | 2011-10-27Methods for RF pulsing of a narrow gap capacitively coupled reactor
#3 | 2011-07-12RF pulsing of a narrow gap capacitively coupled reactor
#4 | 2011-03-24Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode
#5 | 2011-01-04Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode
#6 | 2009-01-22Methods of sputtering a protective coating on a semiconductor substrate
#7 | 2008-09-04Uniform etch system
#8 | 2008-05-13Uniform etch system
#9 | 2007-12-13Preventing damage to low-k materials during resist stripping
#10 | 2007-11-13Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon addition
#11 | 2007-06-07WAFERLESS AUTOMATIC CLEANING AFTER BARRIER REMOVAL
#12 | 2007-06-05Preventing damage to low-k materials during resist stripping
#13 | 2007-01-30Gas distribution system with tuning gas
#14 | 2006-05-09Method for selectively etching organosilicate glass with respect to a doped silicon carbide
#15 | 2006-03-09Wafer bevel polymer removal
#16 | 2005-12-15Line edge roughness reduction for trench etch
#17 | 2005-10-20Waferless automatic cleaning after barrier removal
#18 | 2005-06-23Temperature controlled hot edge ring assembly for reducing plasma reactor etch rate drift
#19 | 2005-05-12Line edge roughness reduction for trench etch
#20 | 2005-01-11Plasma processor with electrode simultaneously responsive to plural frequencies
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