Kyoto
Japan
12
2023-05-11
The entities that hold a legal rights for patent applications filed by inventor Ebe Akinori:
Akinori Ebe from Kyoto, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma generator
#2 | 2021-10-21RADIO-FREQUENCY ANTENNA AND PLASMA PROCESSING DEVICE
#3 | 2012-02-09PLASMA PROCESSING APPARATUS
#4 | 2011-08-25Thin-film forming sputtering system
#5 | 2011-05-19Plasma generation device and plasma processing device
#6 | 2011-04-07Radio-frequency antenna unit and plasma processing apparatus
#7 | 2010-12-02Plasma generator, plasma control method and method of producing substrate
#8 | 2010-10-21Plasma processing apparatus
#9 | 2010-07-29PLASMA GENERATING METHOD, PLASMA GENERATING APPARATUS, AND PLASMA PROCESSING APPARATUS
#10 | 2007-08-23Plasma generating method, plasma generating apparatus, and plasma processing apparatus
#11 | 2007-08-23Plasma generating method, plasma generating apparatus, and plasma processing apparatus
#12 | 2007-05-03Plasma producing method and apparatus as well as plasma processing apparatus
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