Aalen
Germany
17
2012-11-22
The entities that hold a legal rights for patent applications filed by inventor Layh Michael:
Michael Layh from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#2 | 2012-09-27Method for adjusting an illumination system of a projection exposure apparatus for projection lithography
#3 | 2012-06-21OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE
#4 | 2012-03-01EUV collector with cooling device
#5 | 2011-07-21Illumination system for EUV microlithography
#6 | 2011-05-05Illumination system for a microlithography projection exposure apparatus, microlithography projection exposure apparatus comprising such an illumination system, and fourier optical system
#7 | 2011-04-28Component for setting a scan-integrated illumination energy in an object plane of a microlithography projection exposure apparatus
#8 | 2011-04-14Optical integrator for an illumination system of a microlithographic projection exposure apparatus
#9 | 2010-11-11Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation
#10 | 2010-11-11Microlithographic projection exposure apparatus
#11 | 2010-10-21Illumination system for illuminating a mask in a microlithographic exposure apparatus
#12 | 2010-06-24Illumination system having a beam deflection array for illuminating a mask in a microlithographic projection exposure apparatus
#13 | 2010-02-18Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus
#14 | 2009-10-22ILLUMINATION OPTICS FOR PROJECTION MICROLITHOGRAPHY AND RELATED METHODS
#15 | 2009-01-22Optical integrator for an illumination system of a microlithographic projection exposure apparatus
#16 | 2009-01-22Illumination system for a microlithographic projection exposure apparatus
#17 | 2009-01-22Microlithographic illumination system
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