Gyeonggi-do
South Korea
5
2012-03-22
The entities that hold a legal rights for patent applications filed by inventor Lee Do-Haing:
Do-Haing Lee from Gyeonggi-do, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support
#2 | 2009-07-16Methods of manufacturing non-volatile memory devices having insulating layers treated using neutral beam irradiation
#3 | 2009-06-04Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support
#4 | 2008-07-31Ion beam apparatus having plasma sheath controller
#5 | 2006-09-28Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same
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