Nara
Japan
4
2012-04-19
Mitsuhiro Okune from Nara, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
DRY ETCHING METHOD AND DRY ETCHING APPARATUS
#2 | 2008-06-12Plasma Processing Apparatus
#3 | 2008-04-24Dry Etching Method And Dry Etching Apparatus
#4 | 2007-06-14Plasma etching method
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