Reichenbach
Germany
5
2012-06-28
The entities that hold a legal rights for patent applications filed by inventor Rosenkranz Norbert:
Norbert Rosenkranz from Reichenbach, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mask inspection microscope with variable illumination setting
#2 | 2010-06-24Method and apparatus for analyzing a group of photolithographic masks
#3 | 2007-03-29Illuminating and imaging system comprising a diffractive beam splitter
#4 | 2006-01-19Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection
#5 | 2005-05-17Imaging system for an extreme ultraviolet (EUV) beam-based microscope
3201993 ⎘