Tamotsu Abe

City:

Tokyo

Country:

Japan

Published Applications:

Last publication date:

2012-11-29

Top Assignees for applications by Tamotsu Abe

The entities that hold a legal rights for patent applications filed by inventor Abe Tamotsu:

Tamotsu Abe from Tokyo, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND OPTICAL ELEMENT CLEANING DEVICE

Method for cleaning optical element of EUV light source device and optical element cleaning device

InventorID:

3301617 ⎘