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Inventor profile of:

Yaomin Xia

City:

Normal, Illinois

Country:

United States

Published Applications:

1

Last publication date:

2012-11-29

Recent patent applications by Xia Yaomin

Yaomin Xia from Normal, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2012-11-29

US20120298302A1

VACUUM PLASMA PPROCESSING CHAMBER WITH A WAFER CHUCK FACING DOWNWARD ABOVE THE PLASMA

InventorID:

3301758 ⎘