Berkeley, California
United States
4
2012-12-13
The entities that hold a legal rights for patent applications filed by inventor Eric Hudson:
Hudson Eric from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Plasma-enhanced substrate processing method and apparatus
#2 | 2012-12-13Capacitively-coupled plasma processing system having a plasma processing chamber for processing a substrate
#3 | 2008-07-03Plasma-enhanced substrate processing method and apparatus
#4 | 2008-07-03Method and apparatus for processing a substrate using plasma
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