Lauchheim
Germany
12
2019-07-11
The entities that hold a legal rights for patent applications filed by inventor Dier Oliver:
Oliver Dier from Lauchheim, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Optical system, in particular for a microlithographic projection exposure apparatus
#2 | 2019-02-28OPTICAL ELEMENT AND OPTICAL ASSEMBLY COMPRISING SAME
#3 | 2019-01-31Method for treating a reflective optical element for the EUV wavelength range, method for producing same, and treating apparatus
#4 | 2018-08-02Mirror, in particular for a microlithographic projection exposure apparatus
#5 | 2016-12-29EUV-mirror, optical system with EUV-mirror and associated operating method
#6 | 2016-11-10EUV mirror and optical system comprising EUV mirror
#7 | 2016-09-15Reflective optical element, and optical system of a microlithographic projection exposure apparatus
#8 | 2016-07-21Surface correction of mirrors with decoupling coating
#9 | 2015-02-12Optical Elements Comprising Magnetostrictive Material
#10 | 2014-09-25EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method
#11 | 2013-09-05Method and arrangement for determining the heating condition of a mirror in an optical system
#12 | 2013-07-11PROJECTION EXPOSURE APPARATUS
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