Dresden
Germany
3
2011-11-03
The entities that hold a legal rights for patent applications filed by inventor Steffen Katja:
Katja Steffen from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Planarization of a material system in a semiconductor device by using a non-selective in situ prepared slurry
#2 | 2011-03-31Superior fill conditions in a replacement gate approach by performing a polishing process based on a sacrificial fill material
#3 | 2011-03-31Forming semiconductor resistors in a semiconductor device comprising metal gates by increasing etch resistivity of the resistors
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